{"name": "Symposim E, \"Materials, Technology, and Reliability for Advanced Interconnects and Low-k Dielectrics\" (2003 San Francisco, Calif.)", "last_modified": {"type": "/type/datetime", "value": "2008-04-01 03:28:50.625462"}, "key": "/authors/OL1398753A", "type": {"key": "/type/author"}, "id": 4720093, "revision": 1}