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Last edited by
MARC Bot
December 5, 2024 |
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Göran Stemme
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Three new sensors and a special structure based on micromachining of silicon
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Göran Stemme
First published in 1987
1 edition
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Chemical detectors
Polyimides
Silica
Silicon
Thermal properties
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ID Numbers
OLID: OL14756226A
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