{"name": "Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films (7th 2003 Paris, France)", "last_modified": {"type": "/type/datetime", "value": "2008-04-01 03:28:50.625462"}, "key": "/authors/OL1519138A", "type": {"key": "/type/author"}, "id": 5214767, "revision": 1}