{"name": "European Conference on Mask Technology for Integrated Circuits and Microcomponents (16th 1999 Munich, Germany)", "last_modified": {"type": "/type/datetime", "value": "2008-04-01 03:28:50.625462"}, "key": "/authors/OL1607046A", "type": {"key": "/type/author"}, "id": 5570782, "revision": 1}