{"name": "International Symposium on Chemical Mechanical Planarization (1st 1996 San Antonio, Tex.)", "last_modified": {"type": "/type/datetime", "value": "2008-04-01 03:28:50.625462"}, "key": "/authors/OL185288A", "type": {"key": "/type/author"}, "id": 472624, "revision": 1}