{"name": "International Symposium on Ultra Clean Processing of Silicon Surfaces (3rd 1996 Antwerp, Belgium)", "last_modified": {"type": "/type/datetime", "value": "2008-04-01 03:28:50.625462"}, "key": "/authors/OL50185A", "type": {"key": "/type/author"}, "id": 125068, "revision": 1}