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Last edited by
RenameBot
August 31, 2008 |
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Marc Westermann
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Solid modeling applied to three-dimensional semiconductor process simulation
by
Marc Westermann
First published in 1995
1 edition
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Subjects
Computer simulation
Design and construction
Integrated circuits
Semiconductors
Three-dimensional integrated circuits
Very large scale integration
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ID Numbers
OLID: OL505384A
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