{"name": "International Symposium on Semiconductor Processing and Characterization with Lasers (1st 1994 Stuttgart, Germany)", "created": {"type": "/type/datetime", "value": "2008-10-09T17:55:20.881912"}, "last_modified": {"type": "/type/datetime", "value": "2008-10-09T17:55:20.881912"}, "key": "/authors/OL5397274A", "type": {"key": "/type/author"}, "id": 27665389, "revision": 1}