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![Cover of: Metrology, inspection, and process control for microlithography XVI: 4-7 March, 2002, Santa Clara, [California] USA](http://covers.openlibrary.org/b/id/14369124-M.jpg "Cover of: Metrology, inspection, and process control for microlithography XVI: 4-7 March, 2002, Santa Clara, [California] USA")
Subjects
Congresses, Microlithography, Electron beam Lithography, Extreme ultraviolet lithography, Industrial applications, Inspection, Integrated circuits, Masks (Electronics), Measurement, Process control, Engineering (General), Molecular electronics, Nanostructured materials, Nanotechnology, Reference, SCIENCE / Biotechnology, Semiconductors, TECHNOLOGY & ENGINEERING, TECHNOLOGY & ENGINEERING / Material Science, TECHNOLOGY & ENGINEERING / Nanotechnology & MEMSID Numbers
- OLID: OL6861889A
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